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Fabrication and Characterization of 2-inch (001) β-Ga 2 O 3 Wafers for Power devices
Fabrication and Characterization of 2-inch (001) β-Ga 2 O 3 Wafers for Power devices
2016
Takekazu Masui
Koshi Kimiyoshi
Watanabe Shinya
Kuramata Akito
Yamakoshi Shigenobu
Keywords:
Power semiconductor device
Optoelectronics
Gallium oxide
Wafer
Fabrication
Materials science
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