Size effect of large deformable nanopillar by focused-ion-beam chemical vapor deposition

Nanoscopic fabrication technique has been achieved by the direct deposition methods using focused-ion-beam chemical vapor deposition (FIB-CVD). The nanopillar fabricated by FIB-CVD consists of an outer amorphous carbon ring and a inner gallium core. We developed the original double-cantilever (DC) bending test using two pillars rigidly connected by the exposure of a focused electron beam in a scanning electron microscope. The obtained deflection curves suggest that nanopillars have the size dependence to the mechanical response. The pillar with the diameter over 180 nm exhibits a wide region of stiffness weakening after linear response and then becomes extremely hardened at a large deflection. Thus, the pillar intrinsically possesses much more flexibility for bending without any fracturing. The accuracy of a DC testing is also discussed by estimating the bending rigidities of nanopillars, comparing to those obtained by resonance frequency tests.