High-Speed Fabry–Pérot Optical Modulator in Silicon With 3-μm Diode

A silicon optical modulator using a novel node-matched-diode geometry inside a Fabry–Perot nanowaveguide resonator is presented. The diode length is only 3 μm. An analysis of the dynamic spectral transmission behavior is given. Non-return-to-zero data transmission of 10 Gb/s is demonstrated.