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Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology
Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology
2015
Eberhard Manske
Roland Füßl
Rostyslav Mastylo
Nataliya Vorbringer-Dorozhovets
Oliver Birli
Gerd Jäger
Keywords:
Electronic engineering
Manufacturing engineering
Metrology
Engineering
Nanotechnology
precision metrology
Systems engineering
Correction
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