Atomic Hydrogen Two-Dimensional Fluorecence Measurements in Chemical Vapor Deposition
1998
Keywords:
- Hybrid physical-chemical vapor deposition
- Thin film
- Electron beam physical vapor deposition
- Combustion chemical vapor deposition
- Plasma processing
- Analytical chemistry
- Plasma-enhanced chemical vapor deposition
- Atomic layer deposition
- Molecular physics
- Pulsed laser deposition
- Materials science
- Chemical engineering
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