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Vapor-Phase Grafting of Functional Silanes to Al2O3, ZnO, and TiO2 Surfaces Prepared By Atomic Layer Deposition
Vapor-Phase Grafting of Functional Silanes to Al2O3, ZnO, and TiO2 Surfaces Prepared By Atomic Layer Deposition
2021
Vepa Rozyyev
Jeffrey W. Elam
Anil U. Mane
Julia G. Murphy
Edward Barry
Steven J. Sibener
Keywords:
Grafting
Chemical engineering
vapor phase
Materials science
Silanes
Atomic layer deposition
Correction
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