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Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)
Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)
2007
Frédéric Montfort
Yves Emery
François Marquet
Etienne Cuche
Nicolas Aspert
Eduardo Solanas
Alexandre Mehdaoui
Adrian M. Ionescu
Christian Depeursinge
Keywords:
Microscopy
Nanotechnology
Materials science
Digital holography
Microelectromechanical systems
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