Microring Modulators in a New Silicon Photonics-Optimized 45 nm Monolithic Electronics-Photonics SOI CMOS Platform

We report on microring modulators in the new 45CLO photonics-optimized 45 nm electronic-photonic CMOS platform. Interdigitated disk and vertical-junction rib microring designs are demonstrated, with 20 GHz bandwidth at 25 Gbps data rate.