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Surface passivation effect of SiO2 film prepared by ALD method
Surface passivation effect of SiO2 film prepared by ALD method
2021
Kenshiro Usuki
Toshimitsu Mochizuki
Tanahashi Katsuto
Hidetaka Takato
Katsuhiko Yamaguchi
Keywords:
Silicon oxide
Chemical engineering
Passivation
Materials science
surface
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