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Advanced Formulation for DSA Resists
Advanced Formulation for DSA Resists
2016
Celia Nicolet
Xavier Chevalier
Julien Beausoleil
Kaumba Sakavuyi
John Berron
Nick Brakensiek
Darron Jurajda
Christophe Navarro
Ian Cayrefourcq
Keywords:
Organic chemistry
Materials science
Copolymer
Resist
Polymer chemistry
Photochemistry
Composite material
Nanotechnology
directed self assembly
Correction
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