Large-scale arrays of single- and few-layer MoS2 nanomechanical resonators

We report the fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS2 drumhead resonators (0.5–2 μm in diameter) offer fundamental resonances (f0) in the very high frequency (VHF) band (up to ∼120 MHz) and excellent figures-of-merit up to f0 × Q ≈ 3 × 1010 Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically ∼15 mN m−1 in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS2 crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.