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Fabrication and Characteristics of MEMS Unimorph Cantilever with Y 2 O 3 -HfO 2 Ferroelectric Thin Film
Fabrication and Characteristics of MEMS Unimorph Cantilever with Y 2 O 3 -HfO 2 Ferroelectric Thin Film
2021
Ryo Ebihara
Shinya Yoshida
Reijirou Shimura
Hiroshi Funakubo
Shuji Tanaka
Keywords:
Cantilever
Optoelectronics
Microelectromechanical systems
ferroelectric thin films
Unimorph
Materials science
Piezoelectricity
Fabrication
Correction
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