Old Web
English
Sign In
Acemap
>
authorDetail
>
Reijirou Shimura
Reijirou Shimura
Cantilever
Optoelectronics
Microelectromechanical systems
ferroelectric thin films
Unimorph
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Fabrication and Characteristics of MEMS Unimorph Cantilever with Y 2 O 3 -HfO 2 Ferroelectric Thin Film
2021
The Japan Society of Applied Physics
Ryo Ebihara
Shinya Yoshida
Reijirou Shimura
Hiroshi Funakubo
Shuji Tanaka
Show All
Source
Cite
Save
Citations (0)
1