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A Morphological, Chemical and Electrical Study of HfSiON Films for Inter Poly Dielectric Applications in Flash Memories
A Morphological, Chemical and Electrical Study of HfSiON Films for Inter Poly Dielectric Applications in Flash Memories
2007
Annalisa Del Vitto
R. Piagge
Massimo Caniatti
C. Wiemer
G. Pavia
F. Sammiceli
Enrica Ravizza
S. Grasso
Simona Spadoni
Alessandro Sebastiani
C. Scozzari
G. Ghidini
Christophe F. Pomarede
Jan Willem Maes
Mauro Alessandri
Keywords:
Dielectric
Electronic engineering
Materials science
Composite material
Nanotechnology
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