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Atomic Layer Etching: Directional
Atomic Layer Etching: Directional
2016
Thorsten Lill
Keren J. Kanarik
Samantha Tan
Meihua Shen
Eric Hudson
Pan Yang
Jeffrey Marks
Vahid Vahedi
Richard A. Gottscho
Keywords:
Etching
Materials science
Optoelectronics
Correction
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