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Keren J. Kanarik
Keren J. Kanarik
Lam Research
Materials science
Scaling
Etching
Optoelectronics
Optics
5
Papers
6
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Universal scaling relationship for atomic layer etching
2021
Journal of Vacuum Science and Technology
Keren J. Kanarik
Samantha Tan
Wenbing Yang
Ivan L. Berry
Pan Yang
Richard A. Gottscho
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Citations (1)
Erratum: “Universal scaling relationship for atomic layer etching” [J. Vac. Sci. Technol. A 39, 010401 (2021)]
2021
Journal of Vacuum Science and Technology
Keren J. Kanarik
Samantha Tan
Wenbing Yang
Ivan L. Berry
Pan Yang
Richard A. Gottscho
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Inside the mysterious world of plasma: A process engineer’s perspective
2020
Journal of Vacuum Science and Technology
Keren J. Kanarik
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Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
2019
Japanese Journal of Applied Physics
Kenji Ishikawa
Tatsuo Ishijima
Tatsuru Shirafuji
Silvia Armini
Emilie Despiau-Pujo
Richard A. Gottscho
Keren J. Kanarik
Gert J. Leusink
Nathan Marchack
Takahide Murayama
Yasuhiro Morikawa
Gottlieb S. Oehrlein
Sangwuk Park
Hisataka Hayashi
Keizo Kinoshita
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Atomic Layer Etching: Directional
2016
Thorsten Lill
Keren J. Kanarik
Samantha Tan
Meihua Shen
Eric Hudson
Pan Yang
Jeffrey Marks
Vahid Vahedi
Richard A. Gottscho
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Citations (2)
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