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Wafer-level Hermetically Sealed Silicon Photonic MEMS
Wafer-level Hermetically Sealed Silicon Photonic MEMS
2021
GaeHun Jo
Pierre Edinger
Simon J. Bleiker
Xiaojing Wang
Alain Yuji Takabayashi
Hamed Sattari
Niels Quack
Moises Jezzini
Peter Verheyen
Iman Zand
Umar Khan
Wim Bogaerts
Göran Stemme
Kristinn B. Gylfason
Frank Niklaus
Keywords:
Wafer
Optoelectronics
Silicon photonics
Microelectromechanical systems
Materials science
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