Investigation of surface morphology of InAs1-x-ySbxPy epilayers grown by liquid phase epitaxy

Abstract Surface morphology of InAs1-x-ySbxPy epilayers grown by liquid phase epitaxy has been studied, which has two typical patterns: crosshatch pattern and shiny uniform pattern, depending on the lattice mismatch between the epilayer and the substrate. Two kinds of micro-defects of globules and hillocks appear in the above two patterns. Although lower temperature growth can eliminate both globules and hillocks, it also brings a problem that the band gap of InAs1-x-ySbxPy alloy is not high due to the low P composition. Our study shows that globules and hillocks have no effects on the crystalline quality and compositional uniformity of InAs1-x-ySbxPy epilayers.