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A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-nano-process and Defect-free Neutral Beam Etching
A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-nano-process and Defect-free Neutral Beam Etching
2009
Chi-Hsien Huang
Makoto Igarashi
M. Tomura
Masaki Takeguchi
Susumu Horita
Yukiharu Uraoka
Takashi Fuyuki
Ichiro Yamashita
Seiji Samukawa
Keywords:
Nanotechnology
Beam (structure)
Nano-
Etching
Materials science
defect free
Correction
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