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Integrating MOFs with MEMS Devices for Chemical Sensing.
Integrating MOFs with MEMS Devices for Chemical Sensing.
2013
Mark D. Allendorf
Julie Marie Denning
Jeffery A. Greathouse
Alex Robinson
Vitalie Stavila
Todd Zeitler
Ilya Ellern
Peter J. Hesketh
Keywords:
Electronic engineering
Microelectromechanical systems
Materials science
Nanotechnology
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