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Wet etching of HfO/sub 2/ assisted by excimer photon irradiation
Wet etching of HfO/sub 2/ assisted by excimer photon irradiation
2003
Satoshi Kume
H. Nishimori
Hiroshi Sugahara
Nobuyuki Hishinuma
T. Arikado
Keywords:
Excimer
Engineering
Etching (microfabrication)
Irradiation
Photochemistry
Photon
photon irradiation
Optoelectronics
Correction
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