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Hiroshi Sugahara
Hiroshi Sugahara
Irradiation
Optoelectronics
Analytical chemistry
Radiation
Contamination
3
Papers
24
Citations
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Cleaning of extreme ultraviolet lithography optics and masks using 13.5nm and 172nm radiation
2005
Journal of Vacuum Science & Technology B
Kazuhiro Hamamoto
Yuusuke Tanaka
Takeo Watanabe
Noriyuki Sakaya
Morio Hosoya
Tsutomu Shoki
Hideo Hada
Nobuyuki Hishinuma
Hiroshi Sugahara
Hiroo Kinoshita
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Citations (21)
Outgassing Characteristics of Structural Materials and the Removal of Contaminants from EUVL Masks using 172-nm Radiation
2004
Journal of Photopolymer Science and Technology
Kazuhiro Hamamoto
Yuzuru Tanaka
Takeo Watanabe
Noriyuki Sakaya
Morio Hosoya
Tsutomu Shoki
Hiroshi Sugahara
Nobuyuki Hishinuma
Hideo Hada
Hiroo Kinoshita
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Citations (3)
Wet etching of HfO/sub 2/ assisted by excimer photon irradiation
2003
ISSM | International Symposium on Semiconductor Manufacturing
Satoshi Kume
H. Nishimori
Hiroshi Sugahara
Nobuyuki Hishinuma
T. Arikado
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