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Damage-free fabrication of slot waveguides
Damage-free fabrication of slot waveguides
2021
Shunsuke Abe
Kaoru Matsuyama
Hideo Hara
Shin Masuda
Hirohito Yamada
Keywords:
Optoelectronics
Fabrication
Silicon photonics
Slot-waveguide
Materials science
Correction
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