Old Web
English
Sign In
Acemap
>
Paper
>
Measurement of the Mechanical Stability of Semiconductor Line Structures in Relevant Media
Measurement of the Mechanical Stability of Semiconductor Line Structures in Relevant Media
2009
Daniel Peter
Michael Dalmer
Hans Kruwinus
Alfred Lechner
Leo Archer
Ernst Gaulhofer
Alexander M. Gigler
Robert W. Stark
Wolfgang Bensch
Keywords:
Structural engineering
Semiconductor
Materials science
Mechanical engineering
mechanical stability
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
3
Citations
NaN
KQI
[]