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A New High Selectivity Acidic Slurry for Chemical Mechanical Planarization of Carbon-Doped Ge2Sb2Te5 Film
A New High Selectivity Acidic Slurry for Chemical Mechanical Planarization of Carbon-Doped Ge2Sb2Te5 Film
2020
Daohuan Feng
Weilei Wang
Weili Liu
Zhitang Song
Keywords:
Chemical engineering
carbon doped
high selectivity
Chemical-mechanical planarization
Slurry
Materials science
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