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In-situ Low Energy Argon Ion Milling of Nanoelectronic Structures Using a Triple Beam System
In-situ Low Energy Argon Ion Milling of Nanoelectronic Structures Using a Triple Beam System
2009
Heiko Stegmann
Yvonne Ritz
D. Utess
H-J Engelmann
Ehrenfried Zschech
Keywords:
Ion milling machine
Analytical chemistry
Beam (structure)
Materials science
In situ
Argon
low energy
Nanotechnology
beam system
Correction
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