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Study of etching-induced damage in p-type GaN by hard X-ray photoelectron spectroscopy
Study of etching-induced damage in p-type GaN by hard X-ray photoelectron spectroscopy
2010
Kikuta Daigo
Narita Tetsuo
Takahashi Naoko
Kataoka Keita
Kimoto Yasuji
Uesugi Tsutomu
Kachi Tetsu
Sugimoto Masahiro
Keywords:
Dry etching
Analytical chemistry
Inductively coupled plasma
Etching
X-ray photoelectron spectroscopy
Materials science
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