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High temperature precipitate formation in high-dose oxygen implanted silicon-on-insulator material
High temperature precipitate formation in high-dose oxygen implanted silicon-on-insulator material
2020
S. J. Krause
C. O. Jung
M.E. Burnham
S. R. Wilson
Keywords:
Materials science
Silicon on insulator
Chemical engineering
Precipitation (chemistry)
Oxygen
Correction
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