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Growth of epitaxial Y 2 O 3 -doped ferroelectric HfO 2 films by sputtering method and their characterization
Growth of epitaxial Y 2 O 3 -doped ferroelectric HfO 2 films by sputtering method and their characterization
2018
H. Funakubo
T. Suzkuki
T Mimura
Takao Shimizu
H. Uchida
Keywords:
Ferroelectricity
Optoelectronics
Sputtering
Doping
Epitaxy
Materials science
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