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Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO + Ion Implantation
Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO + Ion Implantation
2021
Vladimir Popov
Sergey M. Tarkov
Fedor V. Tikhonenko
Valentin Antonov
Ida E. Tyschenko
Sergey G. Simakin
Konstantin V. Rudenko
Keywords:
Silicon
Chemical engineering
Materials science
high resistance
low resistance
Ion implantation
Correction
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