A novel volumetric silicon micropump with integrated sensors

We present a novel peristaltic micropump based on piezoelectric actuation and active valves that combines high fluidic performances of a volumetric pump and the integration of sensors. The latter are localized directly on the membranes that consequently are used for pumping as well as for sensing. This achievement was possible thanks to an original fabrication process based on a SOI (Silicon On Insulator) wafer, enabling additional MEMS technological steps such as photolithography or ion implantation to be performed on the membranes.