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Reduction of parasitic reaction during the AlN growth by HT-MOVPE
Reduction of parasitic reaction during the AlN growth by HT-MOVPE
2021
Kentaro Nagamatsu
Shota Tsuda
Reiya Aono
Manabu Miyagawa
Yuuya Ageta
Hideki Hirayama
Yuusuke Takashima
Yoshiki Naoi
Keywords:
Chemical engineering
Materials science
Metalorganic vapour phase epitaxy
parasitic reaction
Crystal growth
Correction
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