Fabrication of combinatorial evaluation substrates for chlorine evolution electrode catalyst

In this study, we proposed and demonstrated combinatorial evaluation substrates, which were fabricated by micro electro mechanical systems (MEMS) process, for brine electrolysis. Proposed evaluation substrate has 9 electrode catalyst samples on the glass substrate. Ir-Ru/Ti and Ir-Ru-Ti/Ti electrode catalyst samples were prepared by a combinatorial co-sputtering system. We evaluated the maximum current density of polarization curves and the durability during brine electrolysis. In the case of binary Ir-Ru/Ti evaluation substrate (composition of Ru ranged from 35.1 to 58.8 at.%.), the maximum current density increased with increasing Ru-content. From these results, we confirmed the usability of proposed combinatorial evaluation substrate for the brine electrolysis. Finally, we evaluated the electrochemical characteristics of 9 Ir-Ru-Ti/Ti samples. Their electrochemical characteristics depend on alloy composition.