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Junction Leakage Characteristics of Shallow Trench Isolation (STI) with Nitrogen Pile-Up Sidewall Oxide
Junction Leakage Characteristics of Shallow Trench Isolation (STI) with Nitrogen Pile-Up Sidewall Oxide
2003
Myeong Won Lee
In Man Kang
Byung Yong Choi
Woo Dong-Soo
Choi Woo-Young
Lee Jong Duk
Park Byung-Gook
Keywords:
Nitrogen
Shallow trench isolation
junction leakage
Pile
Materials science
Oxide
Composite material
Correction
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