Large scale flash memory system (LSFMS) for photomask defect inspection machine
2010
Concept of asynchronous DB defects inspection machine was contrived to the purpose of reducing the price which had
large scale flash memory buffer. This memory buffer was located in between reference data rendering computer and
scanner; also it was located in scanner and image computer. As first step to make the concept model real, an
experimental system was built which had virtual scanner.
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