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Three-dimensional Deformation Analysis of MEMS/NEMS by means of X-ray Computer-Tomography
Three-dimensional Deformation Analysis of MEMS/NEMS by means of X-ray Computer-Tomography
2011
Michael Dost
Rolf Erb
W. Faust
Jens Hammacher
B. Michel
Lutz Scheiter
Keywords:
Nanoelectromechanical systems
Deformation (mechanics)
Tomography
Optics
Microelectromechanical systems
X-ray
Materials science
three dimensional deformation
Correction
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