Further miniaturization of O 3 -sensors for smart integration - heterointegration

This paper focuses on packaging and miniaturization of ozone sensors and review aspects of their heterointegration together with other physical sensors for consumer electronics (CE) and internet of things (IoT) applications. We present a concept and simulations of an optically regenerated gas sensor for ozone detection [1]. A demonstrator of innovative stand-alone miniaturized gas sensor according to a previously evaluated concept [2] is shown and measured performance is compared to an unpackaged sensor. In this work we also evaluate the impact of the integration of such sensor together with other environmental sensors i.e. pressure sensor. Measured is the performance of the pressure sensors with and without ozone sensor elements.