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Role of O 2 plasma on electrical characteristics improvement of ALD-deposited SiO 2 by microwave plasma
Role of O 2 plasma on electrical characteristics improvement of ALD-deposited SiO 2 by microwave plasma
2019
Toshiya Suzuki
Niklas Holm
Väinö Kilpi
Tom Blomberg
Keywords:
Materials science
Ion source
Atomic layer deposition
Plasma
Chemical engineering
Silicon dioxide
Correction
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