Hybrid Silicon Photonic-Lithium Niobate Electro-Optic Mach-Zehnder Modulator Beyond 100 GHz

Advances in silicon (Si) photonics have resulted in phase (depletion mode) electro-optic modulators (EOMs) with an electrical 3-dB bandwidth up to 50 GHz, but to achieve higher bandwidths, different materials and physical phenomena are used. Lithium Niobate (LN) Mach-Zehnder modulators (MZM), while being the traditional EOM platform, have not yet demonstrated DC-to-beyond-100-GHz electrical bandwidths. We demonstrate a hybrid LN-Si MZM which achieves 102 GHz 3-dB electrical bandwidth; this EOM exceeds the bandwidth of the highest-speed bulk LN MZM previously reported by 32 GHz, with V{\pi}L=6.6 V.cm being more than 50% lower. Our design allows compatibility with silicon photonics, with light input/output and optical components, including directional couplers, low-radius bends, and path-length difference segments, realized in a foundry Si photonics process. An un-patterned thin-film of LN was simply bonded to the patterned Si waveguide circuits. Such a device can bring ultrawide electro-optic bandwidths to integrated silicon photonics, and benefit applications in analog and digital communications, millimeter-wave instrumentation, analog-to-digital conversion, sensing, antenna remoting and phased arrays.