Towards high efficiency on full wafer a-Si:H/c-Si heterojunction solar cells: 19.6% on 148cm 2

In this work, we present our recent technological improvements realized on 148.5cm 2 amorphous/crystalline double heterojunction solar cells. In particular, we have transferred our old solar cells fabrication process to an integrated JUSUNG large area cluster (PECVD/ MOCVD/ PVD). An optimization of all the fabrication steps separately, as well as a careful preparation of the silicon wafer's surface has allowed us to obtain efficiencies up to 19.6 % on large area solar cells (148.5cm 2 ). The homogeneity and reproducibility of the process developed has been demonstrated on several successive batches with all efficiencies measured over 19.2%. All the fabrication process is performed at temperatures <200°C.