Fabrication of microglass lens mould by using ultraprecision microgrinding process

With the rapid development of information technology and electro-optical communication industry, various micro optical lenses have been used widely. Especially, because of great advantages concerning life, stability and imaging characteristics, the demand for glass lens is increasing the high-precision imaging. This paper studies on the ultra-precision parallel grinding technique of micro glass lens mould and investigates the form error compensation technique in grinding process. Grinding test of micro-lens mould with 10mm in diameter is conducted, and the surface roughness of R a 5.98nm, Rz 34.95nm and form accuracy of PV 113nm, RMS 23nm are obtained.