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Silicon chemical vapor deposition from Si2Cl6 and Si3Cl8.
Silicon chemical vapor deposition from Si2Cl6 and Si3Cl8.
1993
Numata M
Kanamori M
Sugiura M
Fuwa A
Keywords:
Ion plating
Thin film
Hybrid physical-chemical vapor deposition
Electron beam physical vapor deposition
Combustion chemical vapor deposition
Plasma processing
Deposition (phase transition)
Pulsed laser deposition
Materials science
Inorganic chemistry
Chemical engineering
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