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Development of Deposition and Etching Technologies for Piezoelectric Elements for Ferroelectric MEMS
Development of Deposition and Etching Technologies for Piezoelectric Elements for Ferroelectric MEMS
2007
Yutaka Kokaze
Isao Kimura
Takehito Jimbo
Mitsuhiro Endo
Masahisa Ueda
Koukou Suu
Keywords:
Etching
Piezoelectricity
Electronic engineering
Ferroelectricity
Microelectromechanical systems
Materials science
Deposition (law)
Nanotechnology
Correction
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