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Trench-filling behavior of Ge-Sb chalcogenide films prepared by various atomic vapor deposition
Trench-filling behavior of Ge-Sb chalcogenide films prepared by various atomic vapor deposition
2014
김형근
Jeong Jin Hwan
안수빈
Doojin Choi
Keywords:
Trench
Chemical engineering
Chalcogenide
Deposition (phase transition)
atomic vapor
Materials science
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