THE RESEARCH OF THE FABRICATION OF Al/Al_2O_3/Al TUNNEL JUNCTION

Our research task is to fabricate the Al/Al_2O_3/Al tunnel junction using the method of the combination of angled evaporation based on a suspended shadw mask.The I~V characteristics of the Al/Al_2O_3/Al tunnel junction were measured at the temperature of 20mK.Al junction is successfully fabricated,which makes it promising for research in quantum qubits.