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Gettering of Impurities in Hydrogen Implanted Nitrogen-Doped Silicon
Gettering of Impurities in Hydrogen Implanted Nitrogen-Doped Silicon
2003
I.V. Antonova
A. Misiuk
A. Barcz
Di Sheng Yang
V.P. Popov
Keywords:
Getter
Nitrogen
Doping
Hydrogen
Impurity
Metallurgy
Inorganic chemistry
Materials science
Silicon
nitrogen doped
Correction
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