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Optical Evaluation of Polycrystalline Silicon Surface Roughness
Optical Evaluation of Polycrystalline Silicon Surface Roughness
1979
K. L. Chiang
C J DellOca
F. N. Schwettmann
Keywords:
Surface roughness
Polycrystalline silicon
Inorganic chemistry
Nanocrystalline silicon
Chemistry
Chemical engineering
Analytical chemistry
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