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Improvement of the thermal sensitivity of MEMS sensors with mesh phononic nanostructures
Improvement of the thermal sensitivity of MEMS sensors with mesh phononic nanostructures
2021
Ryoko Yamamoto
Naomi Nagai
Kazuhiko Hirakawa
Akira Kojima
Nobuyoshi Koshida
Ya Zhang
Keywords:
Materials science
Sensitivity (control systems)
Microelectromechanical systems
Terahertz radiation
Thermal
Optoelectronics
mems sensors
Nanostructure
Correction
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