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LETTER TO THE EDITOR: Repair of opaque defects in photomasks using focused ion beams
LETTER TO THE EDITOR: Repair of opaque defects in photomasks using focused ion beams
1987
Philip D. Prewett
Peter J Heard
Keywords:
Nuclear magnetic resonance
Letter to the editor
Focused ion beam
Opacity
Beam (structure)
Nanotechnology
Ion
Physics
Optics
Photomask
Correction
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