Research on the material transportation automation technology based on SEMI standard

Using SEMI standards to provide the communication interface and communication information between the semiconductor device and the factory host, in order to improve the yield and quality of semiconductor products has been a general consensus. In this paper, through the analysis of the related standard about the material transport in SEMI, and the specific introduction of the actual device model of the semiconductor equipment, describes the process of material transportation factory automation technology and the application in the actual equipment.